Normal Close High Vacuum Solenoid Valve XSA

• ・Minimum operating pressure: 1 × 10

-6

 Pa (abs)

• ・Leakage: Internal 1.3 × 10

-9

•  Pa·m

3

• /s, External 1.3 × 10

-11

•  Pa·m

3

/s

・2 types of fittings and female threads are available.

・Power consumption: Max. 25% reduction